激光器經(jing)過200多年的(de)發展,已經(jing)研制(zhi)出(chu)了(le)上百(bai)種不同的(de)類型,它們特點(dian)各異,用途也不同,一般可以(yi)按照以(yi)下方法進行分類。
①按工作(zuo)介質來分類(lei)。主要有(you)(you)氣體激光器(qi)、固體激光器(qi)和半(ban)導體激光器(qi)三種類(lei)型,此(ci)外還有(you)(you)化學(xue)激光器(qi)和自由電子激光器(qi)等。
a.氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti)激(ji)(ji)(ji)(ji)光(guang)(guang)(guang)器(qi)(qi)。工(gong)作(zuo)(zuo)(zuo)介質(zhi)(zhi)(zhi)主(zhu)要(yao)(yao)以氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti)狀態進行發射的(de)(de)(de)(de)激(ji)(ji)(ji)(ji)光(guang)(guang)(guang)器(qi)(qi),在常(chang)溫常(chang)壓下是氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti),有(you)(you)的(de)(de)(de)(de)物質(zhi)(zhi)(zhi)在通常(chang)條件下是液體(ti)(ti)(ti)(ti)(ti)(ti)(如水、汞(gong))或(huo)者固體(ti)(ti)(ti)(ti)(ti)(ti)(如銅、鎘等(deng)),工(gong)作(zuo)(zuo)(zuo)時加熱(re)變為(wei)(wei)蒸氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi),利(li)用(yong)(yong)(yong)這類蒸氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)作(zuo)(zuo)(zuo)為(wei)(wei)工(gong)作(zuo)(zuo)(zuo)介質(zhi)(zhi)(zhi)的(de)(de)(de)(de)也(ye)稱(cheng)為(wei)(wei)氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti)激(ji)(ji)(ji)(ji)光(guang)(guang)(guang)器(qi)(qi)。氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti)激(ji)(ji)(ji)(ji)光(guang)(guang)(guang)器(qi)(qi)中除了發出(chu)激(ji)(ji)(ji)(ji)光(guang)(guang)(guang)的(de)(de)(de)(de)工(gong)作(zuo)(zuo)(zuo)氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti)混合。為(wei)(wei)了延長(chang)器(qi)(qi)件的(de)(de)(de)(de)工(gong)作(zuo)(zuo)(zuo)壽命及提高輸出(chu)功(gong)率(lv),還加入了一定量的(de)(de)(de)(de)輔助氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti)與工(gong)作(zuo)(zuo)(zuo)氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti)混合。氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti)激(ji)(ji)(ji)(ji)光(guang)(guang)(guang)器(qi)(qi)所采(cai)用(yong)(yong)(yong)的(de)(de)(de)(de)工(gong)作(zuo)(zuo)(zuo)物質(zhi)(zhi)(zhi)可(ke)以是原(yuan)(yuan)子(zi)(zi)(zi)氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti)、分子(zi)(zi)(zi)氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti)或(huo)離(li)(li)子(zi)(zi)(zi)氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti)。在原(yuan)(yuan)子(zi)(zi)(zi)氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti)激(ji)(ji)(ji)(ji)光(guang)(guang)(guang)器(qi)(qi)中,產生激(ji)(ji)(ji)(ji)光(guang)(guang)(guang)作(zuo)(zuo)(zuo)用(yong)(yong)(yong)的(de)(de)(de)(de)是沒有(you)(you)電離(li)(li)的(de)(de)(de)(de)氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti)原(yuan)(yuan)子(zi)(zi)(zi),所用(yong)(yong)(yong)的(de)(de)(de)(de)氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti)主(zhu)要(yao)(yao)是幾種惰性(xing)氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti)(如氦(hai)、氖、氬、氪(ke)、缸等(deng)),有(you)(you)時也(ye)可(ke)采(cai)用(yong)(yong)(yong)某些(xie)金屬原(yuan)(yuan)子(zi)(zi)(zi)(如銅、鋅、鎘、銫、汞(gong)等(deng))蒸氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi),或(huo)其他(ta)元素原(yuan)(yuan)子(zi)(zi)(zi)氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti)等(deng)。原(yuan)(yuan)子(zi)(zi)(zi)氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti)激(ji)(ji)(ji)(ji)光(guang)(guang)(guang)器(qi)(qi)的(de)(de)(de)(de)典型代表(biao)是He-Ne氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti)激(ji)(ji)(ji)(ji)光(guang)(guang)(guang)器(qi)(qi)。在分子(zi)(zi)(zi)氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti)激(ji)(ji)(ji)(ji)光(guang)(guang)(guang)器(qi)(qi)中,產生激(ji)(ji)(ji)(ji)光(guang)(guang)(guang)作(zuo)(zuo)(zuo)用(yong)(yong)(yong)的(de)(de)(de)(de)是沒有(you)(you)電離(li)(li)的(de)(de)(de)(de)氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti)分子(zi)(zi)(zi),所采(cai)用(yong)(yong)(yong)的(de)(de)(de)(de)主(zhu)要(yao)(yao)分子(zi)(zi)(zi)氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti)工(gong)作(zuo)(zuo)(zuo)物質(zhi)(zhi)(zhi)有(you)(you)CO2、CON2、H2和水蒸氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)等(deng)。分子(zi)(zi)(zi)氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti)激(ji)(ji)(ji)(ji)光(guang)(guang)(guang)器(qi)(qi)的(de)(de)(de)(de)典型代表(biao)是二氧化(hua)碳(tan)(CO2)激(ji)(ji)(ji)(ji)光(guang)(guang)(guang)器(qi)(qi)和氮分子(zi)(zi)(zi)(N2)激(ji)(ji)(ji)(ji)光(guang)(guang)(guang)器(qi)(qi)。離(li)(li)子(zi)(zi)(zi)氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti)激(ji)(ji)(ji)(ji)光(guang)(guang)(guang)器(qi)(qi)利(li)用(yong)(yong)(yong)電離(li)(li)化(hua)的(de)(de)(de)(de)氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti)離(li)(li)子(zi)(zi)(zi)產生激(ji)(ji)(ji)(ji)光(guang)(guang)(guang)作(zuo)(zuo)(zuo)用(yong)(yong)(yong),主(zhu)要(yao)(yao)的(de)(de)(de)(de)有(you)(you)惰性(xing)氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti)離(li)(li)子(zi)(zi)(zi)和金屬蒸汽離(li)(li)子(zi)(zi)(zi),這方面的(de)(de)(de)(de)代表(biao)型器(qi)(qi)件是氬離(li)(li)子(zi)(zi)(zi)激(ji)(ji)(ji)(ji)光(guang)(guang)(guang)器(qi)(qi)、氪(ke)離(li)(li)子(zi)(zi)(zi)激(ji)(ji)(ji)(ji)光(guang)(guang)(guang)器(qi)(qi)等(deng)。氣(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)(ti)(ti)激(ji)(ji)(ji)(ji)光(guang)(guang)(guang)器(qi)(qi)具有(you)(you)結構簡單、造價低(di)、操(cao)作(zuo)(zuo)(zuo)方便、工(gong)作(zuo)(zuo)(zuo)介質(zhi)(zhi)(zhi)均勻、光(guang)(guang)(guang)束質(zhi)(zhi)(zhi)量好(hao)以及能長(chang)時間較穩定地(di)連(lian)續工(gong)作(zuo)(zuo)(zuo)的(de)(de)(de)(de)優點。因此(ci),它是目(mu)前品種最多、應用(yong)(yong)(yong)最廣泛的(de)(de)(de)(de)一類激(ji)(ji)(ji)(ji)光(guang)(guang)(guang)器(qi)(qi)。市場占有(you)(you)率(lv)達60%左右。
b.固(gu)(gu)體(ti)激光器(qi)。固(gu)(gu)體(ti)激光器(qi)的工(gong)作介質是在作為基質材料的晶體(ti)或玻(bo)璃(li)中(zhong)(zhong)均勻摻(chan)(chan)入少量激活(huo)離(li)(li)子,除了(le)用(yong)紅(hong)寶石和(he)玻(bo)璃(li)外(wai),常用(yong)的還有在釔鋁石榴(liu)石(YAG)晶體(ti)中(zhong)(zhong)摻(chan)(chan)人三價(jia)奴(nu)離(li)(li)子(Nd3+)的激光器(qi),它(ta)發(fa)射1060nm的近紅(hong)外(wai)激光。固(gu)(gu)體(ti)激光器(qi)連(lian)續功率一(yi)般(ban)可(ke)(ke)達(da)1000W以(yi)上,脈(mo)沖(chong)峰(feng)值功率可(ke)(ke)達(da)109W。一(yi)般(ban)固(gu)(gu)體(ti)激光器(qi)具有器(qi)件(jian)小、堅固(gu)(gu)、使(shi)用(yong)方便、輸出功率大的特點(dian)。近年來發(fa)展十(shi)分迅猛的光纖激光器(qi),其工(gong)作物質是一(yi)段光纖,光纖中(zhong)(zhong)摻(chan)(chan)雜(za)不同(tong)的元素。能(neng)夠產(chan)生(sheng)波段范(fan)圍(wei)很寬的激光。
C.半(ban)(ban)(ban)(ban)導(dao)(dao)(dao)體(ti)激(ji)(ji)(ji)(ji)(ji)光(guang)(guang)器(qi)(qi)。半(ban)(ban)(ban)(ban)導(dao)(dao)(dao)體(ti)激(ji)(ji)(ji)(ji)(ji)光(guang)(guang)器(qi)(qi)以半(ban)(ban)(ban)(ban)導(dao)(dao)(dao)體(ti)材料作(zuo)(zuo)為工(gong)(gong)作(zuo)(zuo)介(jie)質,目前較(jiao)成熟的(de)(de)是(shi)(shi)砷(shen)(shen)化(hua)(hua)(hua)稼激(ji)(ji)(ji)(ji)(ji)光(guang)(guang)器(qi)(qi),發(fa)(fa)射840nm的(de)(de)激(ji)(ji)(ji)(ji)(ji)光(guang)(guang)。另有(you)摻(chan)鋁的(de)(de)砷(shen)(shen)化(hua)(hua)(hua)鎵、硫(liu)化(hua)(hua)(hua)鉻、硫(liu)化(hua)(hua)(hua)鋅等(deng)(deng)激(ji)(ji)(ji)(ji)(ji)光(guang)(guang)器(qi)(qi)。半(ban)(ban)(ban)(ban)導(dao)(dao)(dao)體(ti)激(ji)(ji)(ji)(ji)(ji)光(guang)(guang)器(qi)(qi)的(de)(de)激(ji)(ji)(ji)(ji)(ji)勵(li)方式(shi)主要有(you)3種,即電(dian)注人式(shi)、光(guang)(guang)泵(beng)式(shi)和(he)高(gao)(gao)能電(dian)子(zi)(zi)束激(ji)(ji)(ji)(ji)(ji)勵(li)式(shi)。電(dian)注人式(shi)半(ban)(ban)(ban)(ban)導(dao)(dao)(dao)體(ti)激(ji)(ji)(ji)(ji)(ji)光(guang)(guang)器(qi)(qi)一般(ban)(ban)是(shi)(shi)由(you)GaAs(砷(shen)(shen)化(hua)(hua)(hua)鎵)、InAs(砷(shen)(shen)化(hua)(hua)(hua)姻(yin))、InSb(銻化(hua)(hua)(hua)姻(yin))等(deng)(deng)材料制成的(de)(de)半(ban)(ban)(ban)(ban)導(dao)(dao)(dao)體(ti)面結型(xing)(xing)(xing)二極管,沿正向偏(pian)壓注人電(dian)流進行激(ji)(ji)(ji)(ji)(ji)勵(li)。光(guang)(guang)泵(beng)式(shi)半(ban)(ban)(ban)(ban)導(dao)(dao)(dao)體(ti)激(ji)(ji)(ji)(ji)(ji)光(guang)(guang)器(qi)(qi),一般(ban)(ban)用(yong)N型(xing)(xing)(xing)或P型(xing)(xing)(xing)半(ban)(ban)(ban)(ban)導(dao)(dao)(dao)體(ti)單(dan)晶(如GaAs、 InSb等(deng)(deng))作(zuo)(zuo)工(gong)(gong)作(zuo)(zuo)物(wu)質,以其(qi)他(ta)激(ji)(ji)(ji)(ji)(ji)光(guang)(guang)器(qi)(qi)發(fa)(fa)出的(de)(de)激(ji)(ji)(ji)(ji)(ji)光(guang)(guang)作(zuo)(zuo)光(guang)(guang)泵(beng)激(ji)(ji)(ji)(ji)(ji)勵(li)。高(gao)(gao)能電(dian)子(zi)(zi)束激(ji)(ji)(ji)(ji)(ji)勵(li)式(shi)半(ban)(ban)(ban)(ban)導(dao)(dao)(dao)體(ti)激(ji)(ji)(ji)(ji)(ji)光(guang)(guang)器(qi)(qi),一般(ban)(ban)也是(shi)(shi)用(yong)N型(xing)(xing)(xing)或者P型(xing)(xing)(xing)半(ban)(ban)(ban)(ban)導(dao)(dao)(dao)體(ti)單(dan)晶(如PbS, US, ZnO等(deng)(deng))作(zuo)(zuo)工(gong)(gong)作(zuo)(zuo)物(wu)質的(de)(de),通過由(you)外部注人高(gao)(gao)能電(dian)子(zi)(zi)束進行激(ji)(ji)(ji)(ji)(ji)勵(li)。在(zai)半(ban)(ban)(ban)(ban)導(dao)(dao)(dao)體(ti)激(ji)(ji)(ji)(ji)(ji)光(guang)(guang)器(qi)(qi)件中,目前性能較(jiao)好,應用(yong)較(jiao)廣的(de)(de)是(shi)(shi)具(ju)有(you)雙異質結構的(de)(de)電(dian)注人式(shi)GaAs二極管激(ji)(ji)(ji)(ji)(ji)光(guang)(guang)器(qi)(qi)。半(ban)(ban)(ban)(ban)導(dao)(dao)(dao)體(ti)激(ji)(ji)(ji)(ji)(ji)光(guang)(guang)器(qi)(qi)體(ti)積小、質量輕(qing)、壽命(ming)長、結構簡單(dan)而(er)堅固(gu),特別適于在(zai)飛(fei)機、車輛(liang)、宇宙(zhou)飛(fei)船(chuan)上使(shi)用(yong)。20世紀70年代末期,由(you)于光(guang)(guang)纖通信和(he)光(guang)(guang)盤技術的(de)(de)發(fa)(fa)展大大推動(dong)了半(ban)(ban)(ban)(ban)導(dao)(dao)(dao)體(ti)激(ji)(ji)(ji)(ji)(ji)光(guang)(guang)器(qi)(qi)的(de)(de)發(fa)(fa)展。
②按波長分類。現有激光(guang)器覆(fu)蓋的(de)(de)波長范(fan)圍包括遠紅外(wai)(wai)、紅外(wai)(wai)、可見光(guang)、紫(zi)外(wai)(wai)直到遠紫(zi)外(wai)(wai),最(zui)近還研(yan)制出了X射線(xian)(xian)激光(guang)器和正(zheng)在開發的(de)(de)Y射線(xian)(xian)激光(guang)器。
③按激(ji)勵(li)方式分(fen)類(lei)。激(ji)光(guang)器按照不同激(ji)勵(li)方式可(ke)分(fen)為光(guang)激(ji)勵(li)(光(guang)源或紫外光(guang)激(ji)勵(li))、氣體放電激(ji)勵(li)、化學反應激(ji)勵(li)、核反應激(ji)勵(li)等類(lei)型。
④按(an)輸(shu)出方(fang)式不同分(fen)類。有連續(xu)(xu)激(ji)(ji)(ji)光(guang)、單(dan)脈(mo)(mo)沖(chong)激(ji)(ji)(ji)光(guang)、連續(xu)(xu)脈(mo)(mo)沖(chong)激(ji)(ji)(ji)光(guang)和超短脈(mo)(mo)沖(chong)激(ji)(ji)(ji)光(guang),其中脈(mo)(mo)沖(chong)激(ji)(ji)(ji)光(guang)的峰(feng)值功率(lv)可以非常大。
⑤按激(ji)(ji)(ji)活介(jie)質的(de)(de)拉(la)子結(jie)構不同分類。有原(yuan)(yuan)子、離子、分子和自由(you)電(dian)子激(ji)(ji)(ji)光(guang)器(qi)(qi)。氦一氖激(ji)(ji)(ji)光(guang)器(qi)(qi)產(chan)生(sheng)的(de)(de)激(ji)(ji)(ji)光(guang)是(shi)由(you)效(xiao)原(yuan)(yuan)子發射(she)的(de)(de),紅寶石激(ji)(ji)(ji)光(guang)器(qi)(qi)產(chan)生(sheng)的(de)(de)激(ji)(ji)(ji)光(guang)則(ze)是(shi)由(you)鉻離子發射(she)的(de)(de)。另外還有二氧化(hua)(hua)碳(tan)分子發射(she)的(de)(de)激(ji)(ji)(ji)光(guang)器(qi)(qi)。激(ji)(ji)(ji)光(guang)的(de)(de)頻率(lv)可以連續(xu)變化(hua)(hua),而且可以覆蓋很(hen)寬的(de)(de)頻率(lv)范圍。
工作(zuo)物(wu)質不同(tong)(tong)(tong),產(chan)生(sheng)的激光(guang)波長也不同(tong)(tong)(tong)。上述各(ge)式各(ge)樣激光(guang)器的出(chu)現,主要(yao)是為了(le)滿足不同(tong)(tong)(tong)的應(ying)用目(mu)(mu)的。目(mu)(mu)前我國(guo)使用最多的激光(guang)器主要(yao)有Co2氣體激光(guang)器和Nd: YAG激光(guang)器,另外近年來隨著大功率光(guang)纖激光(guang)器制(zhi)造技術的發展,其在(zai)工業中的應(ying)用也逐漸(jian)增多。